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Patterning ultrathin polymethylene films : Applications as a resist in electrochemical growth of conducting patterns

Author
LEE, W.-C1 ; PANDIAN, K1 ; TAO, Y.-T1
[1] Institute of Chemistry, Academia Sinica, Taipei, Taiwan, Province of China
Conference title
Proceedings of the Second Asian Symposium on Organised Molecular Films for Electronics and Photonics (ASOMF 2)
Conference name
Asian Symposium on Organised Molecular Films for Electronics and Photonics (ASOMF) (ASOMF) (2 ; Beijing 1998-11-01)
Author (monograph)
JIANG, Long (Editor)1 ; LIU, Zhongfan (Editor)2
[1] Institute of Photographic Chemistry, Chinese Academy of Sciences, China
[2] Nanoscale Science & Technology, Peking University, China
Source

Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals. 1999, Vol 337, pp 13-18 ; ref : 7 ref

ISSN
1058-725X
Scientific domain
Crystallography
Publisher
Gordon and Breach, Philadelphia, PA
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Aniline polymère Dépôt électrolytique Electrorésist Fabrication microélectronique Film complexe Formation motif Morphologie Méthylène polymère Or Polymère conducteur Polymérisation électrolytique Préparation Relation mise en œuvre structure Utilisation
Keyword (en)
Aniline polymer Electrodeposition Electroresist Microelectronic fabrication Composite film Patterning Morphology Methylene polymer Gold Conducting polymers Electrochemical polymerization Preparation Structure processing relationship Use
Keyword (es)
Anilina polímero Depósito electrolítico Polímero electrosensible Fabricación microeléctrica Película compleja Formacíon motivo Morfología Metileno polímero Oro Polimerización electrolítica Preparación Relación puesta en marcha estructura Utilización
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09B Polymers and radiations / 001D09B04 Properties and characterization

Discipline
Electronics Physical chemistry of polymers
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1348175

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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