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Preparation of Co-Ti-N nanocomposite films

Author
CHEN, C. C1 ; SHI, J1 ; HASHIMOTO, M1
[1] Department of Applied Physics and Chemistry, The University of Electro-Communications 1-5-1, Chofugaoka, Chofu-shi, Tokyo, 182-8585, Japan
Conference title
Proceedings of Symposium C on Protective Coatings and Thin Films-01, E-MRS Spring Conference, Strasbourg, France, June 5-8 2001
Conference name
E-MRS: European Materials Research Society Spring Meeting (Strasbourgh 2001-06-05)
Author (monograph)
BANGERT, Herwig (Editor)1 ; MÄNTYLÄ, Tapio (Editor)2 ; PAULEAU, Yves (Editor)3 ; RADIC, Nikola (Editor)4 ; RADNOCZI, György (Editor)5
European Materials Research Society, Europe (Funder/Sponsor)
[1] University of Technology, Wien, Austria
[2] Tampere University of Technology, Tampere, Finland
[3] National Polytechnic Institute of Grenoble, Grenoble, France
[4] Ruder Boskovic Institute, Zagreb, Croatia
[5] Research Institute for Technical Physics and Materials Sciences, Budapest, Hungary
Source

Surface & coatings technology. 2002, Vol 151-52, pp 59-62 ; ref : 11 ref

CODEN
SCTEEJ
ISSN
0257-8972
Scientific domain
General chemistry, physical chemistry; Metallurgy, welding
Publisher
Elsevier, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Keyword (fr)
Cobalt nitrure Composé ternaire Couche mince Diffraction électron Etude expérimentale Microscopie force atomique Microscopie électronique balayage Microscopie électronique transmission Nanocomposite Pulvérisation irradiation Pulvérisation réactive Titane nitrure
Keyword (en)
Cobalt nitrides Ternary compounds Thin films Electron diffraction Experimental study Atomic force microscopy Scanning electron microscopy Transmission electron microscopy Nanocomposite Sputtering Reactive sputtering Titanium nitrides
Keyword (es)
Nanocompuesto
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Pacs
8115C Deposition by sputtering

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
13503488

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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