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Amplification in light-induced reaction of Cu with Cl2 in the VUV

Author
RAAF, H1 ; GROEN, M1 ; SCHWENTNER, N1
[1] Institut für Experimentalphysik, Freie Universität Berlin, Arnimallee 14, 14195 Berlin, Germany
Conference title
ICPEPA-3: Proceedings of Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference, Strasbourg, France, June 1-4, 1999
Conference name
ICPEPA E-MRS Spring Conference. Symposium A on Photo-Excited Processes, Diagnostics and Applications (3 ; Strasbourg 1999-06-01)
Author (monograph)
PELED, Aaron (Editor)1 ; HESS, Peter (Editor)2 ; HANABUSA, Mitsugu (Editor)3 ; BOYD, Ian W (Editor)4
Council of Europe, Strasbourg, France (Funder/Sponsor)
Commission of European Communities, Brussels, Europe (Funder/Sponsor)
[1] Center for Technological Education Holon, Israel
[2] Ruprecht -Karls- University, Heidelberg, Germany
[3] Toyohashi University of Technology, Japan
[4] University College London, United Kingdom
Source

Applied surface science. 2000, Vol 154-55, pp 536-541 ; ref : 17 ref

ISSN
0169-4332
Scientific domain
General chemistry, physical chemistry; Crystallography; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
Publisher
Elsevier Science, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Chlore molécule Cuivre Photolithographie Rayonnement UV extrême Rayonnement synchrotron Gravure sèche
Keyword (en)
Chlorine molecules Copper Photolithography Vacuum ultraviolet radiation Synchrotron radiation
Keyword (es)
Cobre Fotolitografía Radiación ultravioleta extrema Radiación sincrotrón
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pacs
8540H Lithography, masks and pattern transfer

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1352458

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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