Amplification in light-induced reaction of Cu with Cl2 in the VUV
- Author
- RAAF, H1 ; GROEN, M1 ; SCHWENTNER, N1
[1] Institut für Experimentalphysik, Freie Universität Berlin, Arnimallee 14, 14195 Berlin, Germany - Conference title
- ICPEPA-3: Proceedings of Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference, Strasbourg, France, June 1-4, 1999
- Conference name
- ICPEPA E-MRS Spring Conference. Symposium A on Photo-Excited Processes, Diagnostics and Applications (3 ; Strasbourg 1999-06-01)
- Author (monograph)
- PELED, Aaron (Editor)1 ; HESS, Peter (Editor)2 ; HANABUSA, Mitsugu (Editor)3 ; BOYD, Ian W (Editor)4
Council of Europe, Strasbourg, France (Funder/Sponsor)
Commission of European Communities, Brussels, Europe (Funder/Sponsor)
[1] Center for Technological Education Holon, Israel
[2] Ruprecht -Karls- University, Heidelberg, Germany
[3] Toyohashi University of Technology, Japan
[4] University College London, United Kingdom - Source
Applied surface science. 2000, Vol 154-55, pp 536-541 ; ref : 17 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Chlore molécule Cuivre Photolithographie Rayonnement UV extrême Rayonnement synchrotron Gravure sèche
- Keyword (en)
- Chlorine molecules Copper Photolithography Vacuum ultraviolet radiation Synchrotron radiation
- Keyword (es)
- Cobre Fotolitografía Radiación ultravioleta extrema Radiación sincrotrón
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1352458
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0169-4332(99)00479-1 
https://dx.doi.org/10.1016/S0169-4332(99)00479-1
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