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Accuracy of differential method to distinguish crystal originated particles from light point defects in Czochralski-grown silicon wafers

Author
SHIMOI, N1 ; KUROKAWA, M1 ; TANABE, A1 ; KOIZUMI, N1 ; MATSUSHITA, Y1
[1] Technical Department, Silicon Division, TOSHIBA Ceramics Co. LTD, 6-861-5, Higashikou, Seiro, Kitakanbara, Niigata 957-0197, Japan
Conference title
Proceedings of the Eighth International Conference on Defects - Recognition, Imaging and Physics in Semiconductors, Narita, Japan, September 15-18, 1999
Conference name
International Conference on Defects - Recognition, Imaging and Physics in Semiconductors (8 ; Narita 1999-09-15)
Author (monograph)
OGAWA, Tomoya (Editor)1 ; TAJIMA, Michio (Editor)2
Japan Society for the Promotion of Science (JSPS) ; 145th Committee, Japan (Funder/Sponsor)
Japan Society of Applied Physics, Japan (Funder/Sponsor)
[1] Gakushuin University, Mejiro, Japan
[2] Institute of Space and Astronautical Science, Sagamihara, Japan
Source

Journal of crystal growth. 2000, Vol 210, Num 1-3, pp 31-35 ; ref : 3 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Attaque chimique Cavité dans réseau Diffusion lumière Défaut croissance Défaut ponctuel Etude expérimentale Faisceau laser Matériau semiconducteur Méthode Czochralski Méthode différentielle Méthode étude Nettoyage Pastille électronique Précision Silicium Si Non métal
Keyword (en)
Chemical etching Voids Light scattering Growth defect Point defects Experimental study Laser beams Semiconductor materials Czochralski method Differential method Investigation method Cleaning Wafers Accuracy Silicon Nonmetals
Keyword (es)
Ataque químico Defecto crecimiento Método diferencial Método estudio
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A72 Defects and impurities in crystals; microstructure / 001B60A72D Experimental determination of defects by diffraction and scattering

Pacs
6172D Experimental determination of defects by diffraction and scattering

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1352943

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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