Strain inhomogeneity mapping in single-crystal layers and membranes by X-ray diffractometry
- Author
- ZSOLDOS, Lehel1 ; GRÖGER, Viktor2 ; HAUGENEDER, Ernst3
[1] Department of General Physics, Loránd Eötvös University Budapest, POB 32, 1518, Budapest, Hungary
[2] Institute of Materialphysik, Vienna University, Strudlhofgasse 4, 1090 Wien, Austria
[3] IMS Nanofabrication GmbH A-1020 Wien, Schreygasse 3, Austria - Source
Journal of applied crystallography. 2002, Vol 35, pp 17-20 ; 1 ; ref : 9 ref
- CODEN
- JACGAR
- ISSN
- 0021-8898
- Scientific domain
- Crystallography
- Publisher
- Blackwell, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche contrainte Couche mince Couche épaisse Courbure Diffraction RX Distribution contrainte Déplacement raie Membrane Méthode mesure Réflexion Bragg Semiconducteur Silicium Couche autoportée Si Non métal
- Keyword (en)
- Strained layer Thin films Thick films Curvature XRD Stress distribution Spectral line shift Membranes Measuring methods Bragg reflection Semiconductor materials Silicon Free standing film Nonmetals
- Keyword (es)
- Capa forzada
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13587086
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1107/S0021889801016703 
https://dx.doi.org/10.1107/S0021889801016703
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