Hot embossing as a method for the fabrication of polymer high aspect ratio structures
- Author
- BECKER, H1 ; HEIM, U1
[1] Jenoptik Mikrotechnik, Goschwitzer Str 40, 07745 Jena, Germany - Source
Sensors and actuators. A, Physical. 2000, Vol 83, Num 1-3, pp 130-135 ; ref : 16 ref
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- A chaud Dispositif micromécanique Dispositif électromécanique Etude expérimentale Fabrication microélectronique Gaufrage Microfluide Microstructure Rapport aspect Structure polymère
- Keyword (en)
- Hot process Micromechanical devices Electromechanical device Experimental study Microelectronic fabrication Embossing Microfluid Microstructure Aspect ratio Polymer structure
- Keyword (es)
- En caliente Dispositivo electromecánico Fabricación microeléctrica Gofrado Microfluido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1359842
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0924-4247(00)00296-X 
https://dx.doi.org/10.1016/S0924-4247(00)00296-X
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