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The photoluminescence of ZnO thin films grown on Si(100) substrate by plasma-enhanced chemical vapor deposition

Author
LI, B. S1 ; LIU, Y. C1 ; ZHI, Z. Z1 ; SHEN, D. Z1 ; LU, Y. M1 ; ZHANG, J. Y1 ; FAN, X. W1
[1] Fine Mechanics and Physics, Key Laboratory of Excited State Processes, Changchun Institute of Optics, Chinese Academy of Sciences, 1-Yan An Road, Changchun 130021, China
Source

Journal of crystal growth. 2002, Vol 240, Num 3-4, pp 479-483 ; ref : 17 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Keyword (fr)
Caractérisation Couche mince Croissance cristalline en phase vapeur Dépôt chimique phase vapeur Energie transition Etude expérimentale Exciton Méthode PECVD Perfection cristalline Photoluminescence Semiconducteur II-VI Spectre UV Spectre absorption Transition niveau énergie Zinc oxyde O Zn Substrat Si ZnO Composé minéral Métal transition composé
Keyword (en)
Characterization Thin films Crystal growth from vapors CVD Transition energy Experimental study Excitons PECVD Crystal perfection Photoluminescence II-VI semiconductors Ultraviolet spectra Absorption spectra Energy-level transitions Zinc oxides Inorganic compounds Transition element compounds
Keyword (es)
Caracterización Energía transición Perfección cristalina
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H55 Photoluminescence / 001B70H55E Ii-vi semiconductors

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)

Pacs
7855E II-VI semiconductors

Pacs
8115G Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
13644745

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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