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Determination of elastic properties of thin films by indentation measurements with a spherical indenter

Author
CHUDOBA, T1 ; SCHWARZER, N1 ; RICHTER, F1
[1] Technische Universität Chemnitz, Institut für Physik, 09107 Chemnitz, Germany
Source

Surface & coatings technology. 2000, Vol 127, Num 1, pp 9-17 ; ref : 31 ref

CODEN
SCTEEJ
ISSN
0257-8972
Scientific domain
General chemistry, physical chemistry; Metallurgy, welding
Publisher
Elsevier, Lausanne
Publication country
Switzerland
Document type
Article
Language
English
Keyword (fr)
Chrome Couche mince Etude expérimentale Indentation Microscopie force atomique Module Young Propriété mécanique Propriété élastique Tungstène
Keyword (en)
Chromium Thin films Experimental study Indentation Atomic force microscopy Young modulus Mechanical properties Elastic properties Tungsten
Keyword (es)
Propiedad elástica
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy

Pacs
6860B Mechanical and acoustical properties

Discipline
Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1365135

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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