Composite coatings producing by magnetron sputtering method
- Author
- SHIRYAEV, S. A; ATAMANOV, M. V; GUSEVA, M. I; MARTYNENKO, Yu. V; MITIN, A. V; MITIN, V. S
- Source
Fizika i himiâ obrabotki materialov. 2002, Num 3, pp 33-37 ; ref : 5 ref
- CODEN
- FKOMAT
- ISSN
- 0015-3214
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding; Polymers, paint and wood industries
- Publisher
- Nauka, Moskva
- Publication country
- Russian Federation
- Document type
- Article
- Language
- Russian
- Keyword (fr)
- Aluminium nitrure Composé binaire Composé ternaire Dépôt physique phase vapeur Etude expérimentale Implantation ion Magnétron Microdureté Microstructure Pulvérisation irradiation Revêtement composite Revêtement Titane carbonitrure Titane Traitement surface Zirconium nitrure
- Keyword (en)
- Aluminium nitrides Binary compounds Ternary compounds Physical vapor deposition Experimental study Ion implantation Magnetrons Microhardness Microstructure Sputtering Composite coating Coatings Titanium carbonitride Titanium Surface treatments Zirconium nitrides
- Keyword (es)
- Revestimiento compuesto Titanio carbonitruro
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13767469
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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