A micromirror device with tilt and piston motions
- Author
- CHIOU, J. C1 ; LIN, Y. C1
[1] Department of Electrical and Control Engineering, National Chiao Tung University, HsinChu, 300-10, Taiwan, Province of China - Conference title
- Design, characterization, and packaging for MEMS and microelectronics (Royal Pines Resort, 27-29 October 1999)
- Conference name
- Design, characterization, and packaging for MEMS and microelectronics. Conference (1999-10-27)
- Author (monograph)
- Courtois, Bernard (Editor); Demidenko, Serge (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 1999, pp 298-303 ; ref : 4 ref
- ISBN
- 0-8194-3494-9
- Scientific domain
- Electronics; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur Angle inclinaison Antenne verticale Conception circuit Degré liberté Equipement thermique Fabrication microélectronique Faisabilité Implantation(topométrie) Micromachine Microusinage Miniaturisation Miroir tournant Mécanique précision Mécanisme 4 barres Mécanisme articulé Problème agencement Réseau transducteur Résultat expérimental Silicium polycristallin Simulation numérique Système électromécanique Tangage Torsion
- Keyword (en)
- Actuator Tilt angle Vertical antenna Circuit design Freedom degree Thermal equipment Microelectronic fabrication Feasibility Layout Micromachine Micromachining Miniaturization Rotating mirror Precision engineering Four bar mechanism Linkage mechanism Layout problem Transducer network Experimental result Polysilicon Numerical simulation Electromechanical system Pitching Torsion
- Keyword (es)
- Accionador Angulo inclinación Antena vertical Concepción circuito Grado libertad Equipo térmico Fabricación microeléctrica Practicabilidad Implantación(topometría) Micromáquina Micromaquinado Miniaturización Espejo giratorio Mecánica precisión Mecanismo 4 barras Mecanismo articulado Problema disposición Red transductora Resultado experimental Silicio policristal Simulación numérica Sistema electromecánico Cabeceo Torsión
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1379215
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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