The influence of arc currents on the properties of carbon nitride films deposited by vacuum cathodic arc method
- Author
- ZHIMIN ZHOU1 ; XIA, L. F1 ; SUN, Y1
[1] School of Material Science and Engineering, Harbin Institute of Technology, #433 Box, 92 West Dazhi Street, Harbin 150001, Heilongjiang, China - Source
Thin solid films. 2002, Vol 413, Num 1-2, pp 26-31 ; ref : 26 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Arc sous vide Arc électrique Carbone nitrure Composition chimique Couche mince Courant électrique Etat amorphe Etude expérimentale Liaison chimique Microstructure Mode liaison Méthode phase vapeur Relation fabrication propriété Spectre Raman Spectre photoélectron RX C N CNx Composé minéral Nitrure
- Keyword (en)
- Vacuum arcs Electric arcs Carbon nitrides Chemical composition Thin films Electric currents Amorphous state Experimental study Chemical bonds Microstructure Binding mode Growth from vapor Fabrication property relation Raman spectra X-ray photoelectron spectra Inorganic compounds Nitrides
- Keyword (es)
- Modo de enlace Método fase vapor Relación fabricación propiedad
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55N Composition and phase identification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13806579
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0040-6090(02)00449-2 
https://dx.doi.org/10.1016/S0040-6090(02)00449-2
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