La microscopie électronique à balayage: une technique devenue industrielle
- Other title
- Scanning electron microscopy : an industrial becoming technique (en)
- Author
- LATHUS, Guillaume1
[1] JEOL Europe SA, France - Source
Photoniques (Orsay). 2002, Num 7, pp 44-48
- Publisher
- Société française d'optique, Orsay
- Publication country
- France
- Document type
- Article
- Language
- French
- Keyword (fr)
- Analyse élémentaire Appareillage Application industrielle Cathodoluminescence EBIC Electron secondaire Emission champ Microscopie électronique balayage Rétrodiffusion électron
- Keyword (en)
- Elementary analysis Instrumentation Industrial application Cathodoluminescence EBIC Secondary electron Field emission Scanning electron microscopy Electron backscattering
- Keyword (es)
- Análisis elemental Aplicación industrial Electrón secundario
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G78 Electron, positron and ion microscopes, electron diffractometers and related techniques
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13863565
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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