Structure and mechanical properties of Ti/C multilayer films deposited by sputtering
- Author
- INOUE, Shozo1 ; NAGAI, Kenji1 ; NIIBE, Masahito2 ; KOTERAZAWA, Keiji1 ; IWASA, Mikio3
[1] Department of Mechanical and Intelligent Engineering, Faculty of Engineering, Himeji Institute of Technology, Himeji 671-2201, Japan
[2] Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, Ako-gun 678-1205 Ikeda 563-8577, Japan
[3] National Institute of Advanced Industrial Science and Technology, Kansai Center, Ikeda 563-8577, Japan - Source
Nippon Kinzoku Gakkaishi (1952). = Journal of the Japan Institute of Metals (1952). 2002, Vol 66, Num 7, pp 778-783 ; ref : 17 ref
- CODEN
- NIKGAV
- ISSN
- 0021-4876
- Scientific domain
- Metallurgy, welding
- Publisher
- Nippon Kinzoku Gakkai, Sendai
- Publication country
- Japan
- Document type
- Article
- Language
- Japanese
- Keyword (fr)
- Carbone Couche mince Couche multimoléculaire Diffraction RX Dépôt physique phase vapeur Etude expérimentale Microscopie force atomique Microscopie électronique balayage Propriété mécanique Pulvérisation irradiation Titane
- Keyword (en)
- Carbon Thin films Multilayer XRD Physical vapor deposition Experimental study Atomic force microscopy Scanning electron microscopy Mechanical properties Sputtering Titanium
- Keyword (es)
- Capa multimolecular
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13870008
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Access to the document
Install on your browser
DOI
10.2320/jinstmet1952.66.7_778 
https://dx.doi.org/10.2320/jinstmet1952.66.7_778
"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:29:\"10.2320\/jinstmet1952.66.7_778\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:9:\"\u0000*\u0000jtitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:9:\"\u0000*\u0000stitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:7:\"\u0000*\u0000date\";s:4:\"2002\";s:9:\"\u0000*\u0000volume\";s:2:\"66\";s:8:\"\u0000*\u0000issue\";s:1:\"7\";s:8:\"\u0000*\u0000spage\";s:3:\"778\";s:8:\"\u0000*\u0000epage\";s:3:\"783\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0021-4876\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:5:\"INOUE\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Shozo\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:12:\"NAGAI, Kenji\";i:1;s:15:\"NIIBE, Masahito\";i:2;s:17:\"KOTERAZAWA, Keiji\";i:3;s:12:\"IWASA, Mikio\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"NIKGAV\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Sendai\";s:6:\"\u0000*\u0000pub\";s:21:\"Nippon Kinzoku Gakkai\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Panist access
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:29:\"10.2320\/jinstmet1952.66.7_778\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:9:\"\u0000*\u0000jtitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:9:\"\u0000*\u0000stitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:7:\"\u0000*\u0000date\";s:4:\"2002\";s:9:\"\u0000*\u0000volume\";s:2:\"66\";s:8:\"\u0000*\u0000issue\";s:1:\"7\";s:8:\"\u0000*\u0000spage\";s:3:\"778\";s:8:\"\u0000*\u0000epage\";s:3:\"783\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0021-4876\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:5:\"INOUE\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Shozo\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:12:\"NAGAI, Kenji\";i:1;s:15:\"NIIBE, Masahito\";i:2;s:17:\"KOTERAZAWA, Keiji\";i:3;s:12:\"IWASA, Mikio\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"NIKGAV\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Sendai\";s:6:\"\u0000*\u0000pub\";s:21:\"Nippon Kinzoku Gakkai\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Istex access
"O:16:\"UnpaywallOpenUrl\":35:{s:8:\"\u0000*\u0000email\";s:27:\"assistance-portail@inist.fr\";s:6:\"\u0000*\u0000fmt\";N;s:6:\"\u0000*\u0000doi\";s:29:\"10.2320\/jinstmet1952.66.7_778\";s:6:\"\u0000*\u0000pii\";N;s:7:\"\u0000*\u0000pmid\";N;s:9:\"\u0000*\u0000atitle\";N;s:9:\"\u0000*\u0000jtitle\";N;s:9:\"\u0000*\u0000stitle\";N;s:7:\"\u0000*\u0000date\";N;s:9:\"\u0000*\u0000volume\";N;s:8:\"\u0000*\u0000issue\";N;s:8:\"\u0000*\u0000spage\";N;s:8:\"\u0000*\u0000epage\";N;s:8:\"\u0000*\u0000pages\";N;s:7:\"\u0000*\u0000issn\";N;s:8:\"\u0000*\u0000eissn\";N;s:9:\"\u0000*\u0000aulast\";N;s:10:\"\u0000*\u0000aufirst\";N;s:9:\"\u0000*\u0000auinit\";N;s:10:\"\u0000*\u0000auinitm\";N;s:5:\"\u0000*\u0000au\";N;s:9:\"\u0000*\u0000aucorp\";N;s:7:\"\u0000*\u0000isbn\";N;s:8:\"\u0000*\u0000coden\";N;s:8:\"\u0000*\u0000genre\";N;s:7:\"\u0000*\u0000part\";N;s:9:\"\u0000*\u0000btitle\";N;s:8:\"\u0000*\u0000title\";N;s:8:\"\u0000*\u0000place\";N;s:6:\"\u0000*\u0000pub\";N;s:10:\"\u0000*\u0000edition\";N;s:9:\"\u0000*\u0000tpages\";N;s:9:\"\u0000*\u0000series\";N;s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";N;}"
Unpaywall access
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:29:\"10.2320\/jinstmet1952.66.7_778\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:9:\"\u0000*\u0000jtitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:9:\"\u0000*\u0000stitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:7:\"\u0000*\u0000date\";s:4:\"2002\";s:9:\"\u0000*\u0000volume\";s:2:\"66\";s:8:\"\u0000*\u0000issue\";s:1:\"7\";s:8:\"\u0000*\u0000spage\";s:3:\"778\";s:8:\"\u0000*\u0000epage\";s:3:\"783\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0021-4876\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:5:\"INOUE\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Shozo\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:12:\"NAGAI, Kenji\";i:1;s:15:\"NIIBE, Masahito\";i:2;s:17:\"KOTERAZAWA, Keiji\";i:3;s:12:\"IWASA, Mikio\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"NIKGAV\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Sendai\";s:6:\"\u0000*\u0000pub\";s:21:\"Nippon Kinzoku Gakkai\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Europe PubMed Central access
"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:29:\"10.2320\/jinstmet1952.66.7_778\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:9:\"\u0000*\u0000jtitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:9:\"\u0000*\u0000stitle\";s:31:\"Nippon Kinzoku Gakkaishi (1952)\";s:7:\"\u0000*\u0000date\";s:4:\"2002\";s:9:\"\u0000*\u0000volume\";s:2:\"66\";s:8:\"\u0000*\u0000issue\";s:1:\"7\";s:8:\"\u0000*\u0000spage\";s:3:\"778\";s:8:\"\u0000*\u0000epage\";s:3:\"783\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0021-4876\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:5:\"INOUE\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Shozo\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:12:\"NAGAI, Kenji\";i:1;s:15:\"NIIBE, Masahito\";i:2;s:17:\"KOTERAZAWA, Keiji\";i:3;s:12:\"IWASA, Mikio\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"NIKGAV\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:84:\"Structure and mechanical properties of Ti\/C multilayer films deposited by sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Sendai\";s:6:\"\u0000*\u0000pub\";s:21:\"Nippon Kinzoku Gakkai\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
arXiv access
