A novel 3D process for single-crystal silicon micro-probe structures
- Author
- PARK, Sangjun1 2 ; KIM, Bonghwan1 2 ; KIM, Jongpal1 ; PAIK, Seungjoon1 3 ; CHOI, Byoung-Doo1 4 ; JUNG, Ilwoo1 3 4 ; CHUN, Kukjin1 3 ; CHO, Dong-Il1 3 4
[1] School of Electrical and Information Engineering, Inter-University Semiconductor Research Center, Seoul National University, San 56-1, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea, Republic of
[2] IC-MEMS Inc., San 56-1, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea, Republic of
[3] ano Bioelectronics and Systems Research Center, Seoul National University, San56-1, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea, Republic of
[4] Automation and Systems Research Institute, Seoul National University, San 56-1, Shinlim-dong, Gwanakgu, Seoul 151-742, Korea, Republic of - Source
Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 650-654 ; ref : 12 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Dispositif microélectromécanique Microusinage Miniaturisation Monocristal Mécanique précision Pointe microscope Poutre cantilever Processus fabrication Silicium Structure 3 dimensions Microusinage substrat Microusinage surface
- Keyword (en)
- Microelectromechanical device Micromachining Miniaturization Monocrystals Precision engineering Microscope tips Cantilever beam Production process Silicon Three dimensional structure Bulk micromachining Surface micromachining
- Keyword (es)
- Dispositivo microelectromecánico Mecánica precisión Viga cantilever Proceso fabricación Estructura 3 dimensiones
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13870140
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/12/5/321 
https://dx.doi.org/10.1088/0960-1317/12/5/321
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