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A novel Love-mode device based on a ZnO/ST-cut quartz crystal structure for sensing applications

Author
KOUROSH KALANTAR ZADEH1 2 ; TRINCHI, Adrian1 2 ; WLODARSKI, Wojtek1 2 ; HOLLAND, Anthony1
[1] School of Electrical and Computer Engineering, RMIT University, City Campus, P.O. Box 2476V, Melbourne 3001, Vic., Australia
[2] Cooperative Research Center (CRC) for Microtechnology, Melbourne, Australia
Source

Sensors and actuators. A, Physical. 2002, Vol 100, Num 2-3, pp 135-143, 9 p ; ref : 40 ref

ISSN
0924-4247
Scientific domain
Physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Article
Language
English
Keyword (fr)
Analyse sensibilité Capteur onde acoustique surface Coefficient température Couplage électromécanique Dispositif couche mince Epaisseur couche Etude expérimentale Microscopie électronique balayage Onde Love Procédé dépôt Zinc oxyde Caractérisation dispositif Substrat quartz Zn O ZnO
Keyword (en)
Sensitivity analysis Surface acoustic wave sensors Temperature coefficient Electromechanical coupling Thin film devices Layer thickness Experimental study Scanning electron microscopy Love waves Deposition process Zinc oxides Device characterization
Keyword (es)
Acoplamiento electromecánico Espesor capa Procedimiento revestimiento
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Pacs
0707D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
13878083

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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