A water-developable negative photoresist based on the photocrosslinking of N-phenylamide groups with reduced environmental impact
- Author
- KYU HO CHAE1 ; GUM JU SUN1 ; JIN KOO KANG1 ; TAEK HYEON KIM1
[1] Department of Applied Chemistry and The Polymer Science & Technology Research Center, Chonnam National University, Kwangju 500-757, Korea, Republic of - Source
Journal of applied polymer science. 2002, Vol 86, Num 5, pp 1172-1180 ; ref : 30 ref
- CODEN
- JAPNAB
- ISSN
- 0021-8995
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- Wiley, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Contraste Copolymérisation radicalaire Etude expérimentale Hydrosolubilité Méthacrylamide dérivé copolymère Photolithographie Photorésist Photosensibilité Préparation Résist négatif Réticulation photochimique Styrènesulfonate polymère Transposition Fries pH Méthacrylamide(N-4-hydroxyphényl) copolymère Méthacrylamide(N-phényl) copolymère
- Keyword (en)
- Contrast Radical copolymerization Experimental study Water solubility Methacrylamide derivative copolymer Photolithography Photoresist Photosensitivity Preparation Negative resist Photochemical crosslinking Styrenesulfonate polymer Fries rearrangement pH
- Keyword (es)
- Contraste Copolimerización radical Estudio experimental Hidrosolubilidad Metacrilamida derivado copolímero Fotolitografía Fotorresistencia Fotosensibilidad Preparación Resistencia negativa Fotorreticulación Estireno sulfonato polímero Transposición Fries pH
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09D Organic polymers / 001D09D02 Preparation, kinetics, thermodynamics, mechanism and catalysts / 001D09D02E Polymers with particular properties
- Discipline
- Physical chemistry of polymers
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13878209
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/app.11060 
https://dx.doi.org/10.1002/app.11060
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