X-ray stress measurement of Cu/TiN films
- Author
- MATSUE, Tatsuya1 ; HANABUSA, Takao2 ; IKEUCHI, Yasukazu1
[1] Dept. of Mat. Eng., Niihama National College of Tech., Yagumo-cho, Niihama, 792-8580, Japan
[2] Dept. of Mech. Eng., Tokushima Univ., Minamijosanjima-cho, Tokushima, 770-8506, Japan - Source
Zairyo. 2002, Vol 51, Num 7, pp 743-748 ; ref : 12 ref
- CODEN
- ZARYAQ
- ISSN
- 0514-5163
- Scientific domain
- Chemical industry parachemical industry; Metallurgy, welding; Polymers, paint and wood industries
- Publisher
- Society of Materials Science, Kyoto
- Publication country
- Japan
- Document type
- Article
- Language
- Japanese
- Keyword (fr)
- Analyse contrainte Contrainte résiduelle Cuivre Epaisseur couche Multicouche Structure cristalline Texture Titane nitrure
- Keyword (en)
- Stress analysis Residual stress Copper Layer thickness Multiple layer Crystalline structure Texture Titanium nitride
- Keyword (es)
- Análisis tensión Tensión residual Cobre Espesor capa Capa múltiple Estructura cristalina Textura Titanio nitruro
- Keyword (de)
- Spannungsanalyse Eigenspannung Kupfer Schichtdicke Mehrfachschicht Kristallstruktur Textur Titannitrid
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C06 Surface treatment
- Discipline
- Metals. Metallurgy
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13892661
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.2472/jsms.51.743 
https://dx.doi.org/10.2472/jsms.51.743
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