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Measurement system for full three-dimensional motion characterization of MEMS

Author
REMBE, Christian1 ; MULLER, Richard S2
[1] Polytec GmbH, 76337 Waldbronn, Germany
[2] Berkeley Sensor and Actuator Center, University of California at Berkeley, 497 Cory Hall, Berkeley, CA 93720, United States
Source

Journal of microelectromechanical systems. 2002, Vol 11, Num 5, pp 479-488, 10 p ; ref : 25 ref

ISSN
1057-7157
Scientific domain
Electronics; Mechanics acoustics; Physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Dispositif microélectromécanique Etude expérimentale Image numérique Interférométrie optique Mesure mouvement Mesure optique Stroboscopie Traitement image
Keyword (en)
Microelectromechanical device Experimental study Digital image Light interferometry Motion measurement Optical measurement Stroboscopy Image processing
Keyword (es)
Dispositivo microelectromecánico Imagen numérica Medida óptica Estroboscopía
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F30 Measurements common to several branches of physics and astronomy / 001B00F30G Velocity, acceleration and rotation

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pacs
0630G Velocity, acceleration, and rotation

Pacs
0710C Micromechanical devices and systems

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
13955650

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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