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Manufacturing effects in microfabricated gas bearings: Axially varying clearance

Author
PIEKOS, E. S1 ; BREUER, K. S2
[1] Department of Aeronautics and Astronautics, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
[2] Brown University, Division of Engineering, Box D, 182 Hope Street, Providence, RI 02912, United States
Source

Journal of tribology. 2002, Vol 124, Num 4, pp 815-821, 7 p ; ref : 13 ref

CODEN
JOTRE9
ISSN
0742-4787
Scientific domain
Mechanical engineering; Mechanics acoustics
Publisher
American Society of Mechanical Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Basse vitesse Jeu mécanique Miniaturisation Mécanique précision Palier gaz Palier lisse Régime permanent Réponse transitoire Tolérance dimensionnelle
Keyword (en)
Low speed Mechanical clearance Miniaturization Precision engineering Gas bearing Journal bearing Steady state Transient response Dimensional tolerance
Keyword (es)
Baja velocidad Juego mecánico Miniaturización Mecánica precisión Soporte gas Cojinete liso Régimen permanente Respuesta transitoria Tolerancia dimensional
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12E Drives / 001D12E03 Bearings, bushings, rolling bearings

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Pacs
0710C Micromechanical devices and systems

Discipline
Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
13964867

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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