Production and characterization of zinc oxide thin films for room temperature ozone sensing
- Author
- BENDER, M1 ; GAGAOUDAKIS, E1 ; MARTINS, R2 ; DOULOUFAKIS, E1 ; NATSAKOU, E1 ; KATSARAKIS, N1 ; CIMALLA, V1 ; KIRIAKIDIS, G1 ; FORTUNATO, E2 ; NUNES, P2 ; MARQUES, A2
[1] Photonics and Electronics Materials Lab, Institute of Electronic Structure and Laser, Foundation for Research and Technology Hellas, PO. Box 1527, 71 110 Heraklion, Crete, Greece
[2] Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP-UNINOVA, 2825-114 Caparica, Portugal - Conference title
- Proceedings from the International school on gas sensors in conjunction with the 3rd European school of the NOSE network, Lecce, Italy, 27th May-2nd June 2001
- Conference name
- European School of the NOSE Network. Conference (3 ; Lecce 2001-05-27) = International School on Gas Sensors. Conference (Lecce 2001-05-27)
- Author (monograph)
- SICILIANO, Pietro (Editor)1
[1] Institute IMM-CNR, Lecce, Italy - Source
Thin solid films. 2002, Vol 418, Num 1, pp 45-50, 6 p ; ref : 27 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Magnetron sputtering techniques Microcrystalline Polycrystalline undoped zinc oxide Spray pyrolysis UV light exposure
- Keyword (fr)
- Couche mince Dépôt pulvérisation Détecteur de gaz Etude expérimentale Fonction réponse Irradiation UV Matériau capteur Ozone Polycristal Zinc oxyde O Zn ZnO
- Keyword (en)
- Thin films Sputter deposition Gas detector Experimental study Response functions Ultraviolet irradiation Sensor materials Ozone Polycrystals Zinc oxides
- Keyword (es)
- Detector de gas Irradiación UV
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14001563
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0040-6090(02)00588-6 
https://dx.doi.org/10.1016/S0040-6090(02)00588-6
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