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A quasianalytic kinetic model for nonequilibrium C2H2(1%)/H2/Ar RF plasmas of interest in nanocrystalline diamond growth

Author
GORDILLO-VAZQUEZ, F. J1 ; ALBELLA, J. M2
[1] Instituto de Ôptica (CSIC), Serrano 121, 28006 Madrid, Spain
[2] Instituto de Materiales de Madrid (CSIC), Cantoblanco, 28049 Madrid, Spain
Source

Plasma sources science & technology (Print). 2002, Vol 11, Num 4, pp 498-512, 15 p ; ref : 47 ref

ISSN
0963-0252
Scientific domain
Plasma physics
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Chauffage radiofréquence plasma Chimie plasma Diamant synthétique Etude théorique Hydrocarbure Hydrogène Modèle cinétique Méthode PECVD Nanocristal Plasma hors équilibre Traitement par plasma
Keyword (en)
Plasma radiofrequency heating Plasma chemistry Synthetic diamond Theoretical study Hydrocarbons Hydrogen Kinetic model PECVD Nanocrystal Non-equilibrium plasma Plasma assisted processing
Keyword (es)
Diamante sintético Modelo cinético Nanocristal
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B65 Plasma simulation / 001B50B65K Magnetohydrodynamic and fluid equation

Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B77 Plasma applications

Pacs
5265K Magnetohydrodynamic and fluid equation

Discipline
Physics of gases, plasmas and electric discharges
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14016933

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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