Numerical simulation of carbon reflection on silicon substrate in chemical vapor deposition method by molecular dynamics
- Author
- KAYABA, T1 ; HAMADA, Y1 ; SAKA, M1
[1] Tohoku University, Department of Mechanical Engineering, Aza-aoba 01, Aramaki, Aoba-ku, Sendai, 980-8579, Japan - Conference title
- Experimental mechanics (Singapore, 29 November - 1 December 2000)
- Conference name
- International conference on experimental mechanics (2 ; Singapore 2000-11-29)
- Author (monograph)
- Fook Siong Chau (Editor); Chenggen Quan (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 2001, pp 341-344 ; ref : 1 ref
- ISBN
- 0-8194-3998-3
- Scientific domain
- Electronics; Mechanics acoustics; Metrology and instrumentation; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Adsorption Carbone Collision atomique Diamant Dispositif couche mince Dynamique moléculaire Dépôt chimique phase vapeur Modélisation Monocristal Nucléation Réflexion Silicium Simulation numérique
- Keyword (en)
- Adsorption Carbon Atom collisions Diamonds Thin film devices Molecular dynamics CVD Modelling Monocrystals Nucleation Reflection Silicon Digital simulation
- Keyword (es)
- Dinámica molecular
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H20 Optical properties of bulk materials and thin films / 001B70H20C Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A10 Methods of crystal growth; physics of crystal growth / 001B80A10A Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80C Rheology / 001B80C10 Fundamentals and general
- Pacs
- 7820C Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
- Pacs
- 8110A Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14044682
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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