An new instrument for measuring mechanical compliance of micro-systems
- Author
- JU, Bingfeng1 ; LIU, Kuo-Kang1 ; LING, Shih Fu1
[1] Center for Mechanics of Micro-systems (CMMs), School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798, Singapore - Conference title
- Experimental mechanics (Singapore, 29 November - 1 December 2000)
- Conference name
- International conference on experimental mechanics (2 ; Singapore 2000-11-29)
- Author (monograph)
- Fook Siong Chau (Editor); Chenggen Quan (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 2001, pp 252-255 ; ref : 7 ref
- ISBN
- 0-8194-3998-3
- Scientific domain
- Electronics; Mechanics acoustics; Metrology and instrumentation; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur piézoélectrique Appareil mesure Caméra CCD Commande mouvement Courbe déformation Diagramme charge Etude expérimentale Mesure déformation Microscope optique Microstructure Propriété mécanique Saisie donnée Test conformité Traitement image
- Keyword (en)
- Piezoelectric actuators Measuring instruments CCD camera Motion control Deformation curve Load curve Experimental study Strain measurement Optical microscopes Microstructure Mechanical properties Data acquisition Compliance test Image processing
- Keyword (es)
- Cámara CCD Curva deformación Diagrama carga
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G05 Computers in experimental physics / 001B00G05P Image processing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20F Deformation and plasticity (including yield, ductility, and superplasticity)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A70 Materials testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14044723
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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