Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
- Author
- KRAUSS, A. R1 ; AUCIELLO, O1 ; GARDOS, M. N5 ; BUSMANN, H. G6 ; MEYER, E. M7 ; DING, M. Q8 ; GRUEN, D. M1 ; JAYATISSA, A1 ; SUMANT, A1 ; TUCEK, J1 ; MANCINI, D. C2 ; MOLDOVAN, N2 ; ERDEMIR, A3 ; ERSOY, D4
[1] Argonne National Laboratory, Materials Science Division, Argonne, IL 60439, United States
[2] Argonne National Laboratory, Experimental Facilities Division, Argonne, IL 60439, United States
[3] Argonne National Laboratory, Energy Technology Division, Argonne, IL 60439, United States
[4] Materials Engineering Department, University of Illinois, Chicago, IL, United States
[5] Raytheon Electronic Systems, 2000 El Segundo, CA 90245, United States
[6] Fraunhofer Institute for Applied Materials Science (IFAM), Bremen, Germany
[7] Institute for Microsensors, Actuators, and Systems, University of Bremen, Bremen, Germany
[8] Beijing Institute of Electronics, Beijing, China - Source
Diamond and related materials. 2001, Vol 10, Num 11, pp 1952-1961 ; ref : 50 ref
- ISSN
- 0925-9635
- Scientific domain
- Crystallography
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Assemblage mécanique Couche mince Diamant Dispositif microélectromécanique Micromachine Mécanique précision Nanocristal C
- Keyword (en)
- Mechanical joint Thin film Diamond Microelectromechanical device Micromachine Precision engineering Nanocrystal
- Keyword (es)
- Ensamblaje mecánico Capa fina Diamante Dispositivo microelectromecánico Micromáquina Mecánica precisión Nanocristal
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14057291
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0925-9635(01)00385-5 
https://dx.doi.org/10.1016/S0925-9635(01)00385-5
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