Pascal and Francis Bibliographic Databases

Help

Permanent link : http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=14076440

Export

Selection :

Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process

Author
DAI, Ching-Liang1 ; KAIHSIANG YEN2 ; CHANG, Pei-Zen2
[1] Department of Mechanical Engineering, Oriental Institute of Technology, 220, Taipei, Taiwan, Province of China
[2] Institute of Applied Mechanics, National Taiwan University, 107, Taipei, Taiwan, Province of China
Source

Journal of micromechanics and microengineering (Print). 2001, Vol 11, Num 6, pp 697-702 ; ref : 12 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Basse tension Commutateur Connexion électrique Dispositif hyperfréquence Dispositif microélectromécanique Domaine fréquence GHz Etude expérimentale Guide onde Machine électrostatique Matériau stratifié Microusinage Polycristal Semiconducteur type p Silicium Structure MSM Substrat Technologie MOS complémentaire Transducteur capacitif
Keyword (en)
Low voltage Selector switch Electrical connection Microwave device Microelectromechanical device GHz range Experimental study Waveguide Electrostatic machine Stratified material Micromachining Polycrystal p type semiconductor Silicon MSM structure Substrate Complementary MOS technology Capacitive transducer
Keyword (es)
Baja tensión Conmutador Conexión eléctrica Dispositivo hiperfrecuencia Dispositivo microelectromecánico Estudio experimental Guía onda Máquina electrostática Material estratificado Micromaquinado Policristal Semiconductor tipo p Silicio Estructura MSM Substrato Tecnología MOS complementario Transductor capacitivo
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Pacs
8540H Lithography, masks and pattern transfer

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14076440

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

Access to the document

Searching the Web