Evaluation of electron beam broadening due to the specimen in analytical electron microscopy
- Author
- OIKAWA, Testuo1 ; LEE, Chang-Woo2 ; KONDO, Yukihito1 ; SHINDO, Daisuke2 ; KONNO, Kijiro3
[1] Application and Reseach Center, JEOL Ltd., Tokyo 196-8558, Japan
[2] Institute for Advanced Materials Processing, Tohoku University, Sendai 980-8577, Japan
[3] Faculty of Engineering, Science University of Tokyo, Tokyo 162-8601, Japan - Source
Nippon Kinzoku Gakkaishi (1952). = Journal of the Japan Institute of Metals (1952). 2001, Vol 65, Num 5, pp 434-436 ; ref : 7 ref
- CODEN
- NIKGAV
- ISSN
- 0021-4876
- Scientific domain
- Metallurgy, welding
- Publisher
- Nippon Kinzoku Gakkai, Sendai
- Publication country
- Japan
- Document type
- Article
- Language
- Japanese
- Keyword (fr)
- Epaisseur Etude expérimentale Faisceau électronique Magnésium oxyde Microscopie électronique analytique Microscopie électronique transmission Monocristal Phase amorphe Résolution spatiale Silicium oxyde Silicium Sonde électronique
- Keyword (en)
- Thickness Experimental study Electron beam Magnesium oxides Analytical electron microscopy Transmission electron microscopy Monocrystals Amorphous phase Spatial resolution Silicon oxides Silicon Electron probes
- Keyword (es)
- Haz electrónico Microscopía electrónica analítica Fase amorfa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14076488
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.2320/jinstmet1952.65.5_434 
https://dx.doi.org/10.2320/jinstmet1952.65.5_434
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