Growth of faceted, ballas-like and nanocrystalline diamond films deposited in CH4/H2/Ar MPCVD
- Author
- YANG, Tien-Syh1 ; LAI, Jir-Yon1 ; CHENG, Chia-Liang2 ; WONG, Ming-Show1
[1] Department of Materials Science and Engineering, National Dong Hwa University, Hualien, Taiwan, Province of China
[2] Department of Physics, National Dong Hwa University, Hualien, Taiwan, Province of China - Source
Diamond and related materials. 2001, Vol 10, Num 12, pp 2161-2166 ; ref : 23 ref
- ISSN
- 0925-9635
- Scientific domain
- Crystallography
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Argon Cinétique Couche mince Cristallinité Croissance cristalline en phase vapeur Diamant Décharge hyperfréquence Dépôt chimique phase vapeur Etude expérimentale Microstructure Minéral synthétique Morphologie Mécanisme croissance Méthode PECVD Nanocristal Précurseur Relation fabrication structure C Non métal
- Keyword (en)
- Argon Kinetics Thin films Crystallinity Crystal growth from vapors Diamonds Microwave discharge CVD Experimental study Microstructure Synthetic mineral Morphology Growth mechanism PECVD Nanocrystal Precursor Fabrication structure relation Nonmetals
- Keyword (es)
- Cristalinidad Descarga hiperfrecuencia Mineral sintético Mecanismo crecimiento Nanocristal Relación fabricación estructura
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A07 Nanoscale materials and structures: fabrication and characterization
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14084117
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0925-9635(01)00495-2 
https://dx.doi.org/10.1016/S0925-9635(01)00495-2
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