Synthesis of amorphous carbon nitride using reactive ion beam sputtering deposition with grazing bombardment
- Author
- BELL, John1 ; ZHUPING CHEN1 ; OLOFINJANA, Ayo1
[1] Research Concentration of Materials Techniques, School of Mechanical, Manufacturing and Medical Engineering, Queensland University of Technology, Gardens Point, Brisbane, QLD 4001, Australia - Source
Diamond and related materials. 2001, Vol 10, Num 12, pp 2184-2189 ; ref : 30 ref
- ISSN
- 0925-9635
- Scientific domain
- Crystallography
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Carbone nitrure Couche mince Dureté Etat amorphe Etude expérimentale Incidence rasante Mode liaison Préparation chimique Pulvérisation faisceau ionique Pulvérisation réactive Relation fabrication propriété Relation fabrication structure C N a-CN Composé minéral Propriété mécanique
- Keyword (en)
- Carbon nitrides Thin films Hardness Amorphous state Experimental study Grazing incidence Binding mode Chemical preparation Ion beam sputtering Reactive sputtering Fabrication property relation Fabrication structure relation Inorganic compounds Mechanical properties
- Keyword (es)
- Incidencia rasante Modo de enlace Pulverización haz iónico Relación fabricación propiedad Relación fabricación estructura
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14084119
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0925-9635(01)00505-2 
https://dx.doi.org/10.1016/S0925-9635(01)00505-2
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