Locally selective bonding of silicon and glass with laser
- Author
- WILD, M. J1 ; GILLNER, A1 ; POPRAWE, R1
[1] Fraunhofer Institut fuer Lasertechnik, Steinbachstr. 15, 52074 Aachen, Germany - Source
Sensors and actuators. A, Physical. 2001, Vol 93, Num 1, pp 63-69 ; ref : 13 ref
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Dépendance température Etude expérimentale Fixation pastille Liaison matériau Mesure température Rayonnement laser Silicium Soudage laser Traitement par laser Verre SBL Selective bonding with laser
- Keyword (en)
- Temperature dependence Experimental study Wafer bonding Bonding Temperature measurement Laser radiation Silicon Laser welding Laser assisted processing Glass
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G20 Thermal instruments, apparatus and techniques / 001B00G20D Thermometry
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pacs
- 0720D Thermometry
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14090020
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0924-4247(01)00622-7 
https://dx.doi.org/10.1016/S0924-4247(01)00622-7
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