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Effect of compressive stress on corrosion-protective quality of titanium nitride films deposited by reactive HCD ion plating

Author
MIURA, Ken'Ichi1 ; ISHIGAMI, Itsuo1
[1] Technology Research Institute of Osaka Prefecture, Izumi 594-1157, Japan
Source

Nippon Kinzoku Gakkaishi (1952). = Journal of the Japan Institute of Metals (1952). 2002, Vol 66, Num 9, pp 935-943 ; ref : 26 ref

CODEN
NIKGAV
ISSN
0021-4876
Scientific domain
Metallurgy, welding
Publisher
Nippon Kinzoku Gakkai, Sendai
Publication country
Japan
Document type
Article
Language
Japanese
Keyword (fr)
Cathode creuse Contrainte compression Couche mince Dépôt physique phase vapeur Effet contrainte Essai corrosion Etude expérimentale Microscopie électronique balayage Morphologie Passivation Placage ionique Protection corrosion Pulvérisation réactive Revêtement protecteur Titane nitrure
Keyword (en)
Hollow cathode Compressive stress Thin film Physical vapor deposition Stress effects Corrosion test Experimental study Scanning electron microscopy Morphology Passivation Ion plating Corrosion protection Reactive sputtering Protective coatings Titanium nitride
Keyword (es)
Cátodo hueco Tensión compresión Capa fina Deposición física fase vapor Ensayo corrosión Estudio experimental Microscopía electrónica barrido Morfología Pasivación Enchapado iónico Protección corrosión Pulverización reactiva Revestimiento protector Titanio nitruro
Keyword (de)
Druckspannung Duennschicht Physikalisches Aufdampfen Korrosionsversuch Experimentelle Untersuchung Rasterelektronenmikroskopie Morphologie Passivierung Ionenplattieren Korrosionsschutz Schutzueberzug Titannitrid
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11E Corrosion / 001D11E03 Corrosion prevention

Discipline
Metals. Metallurgy
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14191612

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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