Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension
- Autor
- HAQUE, M. A1 ; SAIF, M. T. A1
[1] Department of Mechanical & Industrial Engineering University of Illinois at Urbana Champaign, 140 MEB, 1206 W. Green Street, Urbana, IL 61820, United States - Fuente
Scripta materialia. 2002, Vol 47, Num 12, pp 863-867, 5 p ; ref : 21 ref
- ISSN
- 1359-6462
- Campo Científico
- Metallurgy, welding
- Editor
- Elsevier Science, New York, NY
- País de la publicación
- United States
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave (fr)
- Aluminium Contrainte traction Couche épaisse Diffraction électron Dispositif microélectromécanique Etude expérimentale Microscopie électronique transmission Module Young Propriété mécanique
- Palabra clave (in)
- Aluminium Tensile stress Thick films Electron diffraction Microelectromechanical device Experimental study Transmission electron microscopy Young modulus Mechanical properties
- Palabra clave (es)
- Tensión traccíon Dispositivo microelectromecánico
- Palabra clave (de)
- Zugspannung
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Disciplina
- Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 14369391
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S1359-6462(02)00306-8 
https://dx.doi.org/10.1016/S1359-6462(02)00306-8
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