Pascal and Francis Bibliographic Databases

Help

Permanent link : http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=14394949

Export

Selection :

Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces

Author
KNAPP, James A1 ; DE BOER, Maarten P2
[1] Department 1111, Radiation Solid Interactions and Processing, Sandia National Laboratories, Albuquerque, NM 87185, United States
[2] Department 1762, Reliability Physics, Sandia National Laboratories, Albuquerque, NM 87185, United States
Source

Journal of microelectromechanical systems. 2002, Vol 11, Num 6, pp 754-764, 11 p ; ref : 33 ref

ISSN
1057-7157
Scientific domain
Electronics; Mechanics acoustics; Physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Adhérence Dispositif microélectromécanique Force électrostatique Frottement statique Micromachine Miniaturisation Modélisation Méthode élément fini Poutre cantilever
Keyword (en)
Adhesion Microelectromechanical device Electrostatic force Stiction Micromachine Miniaturization Modeling Finite element method Cantilever beam
Keyword (es)
Adherencia Dispositivo microelectromecánico Fuerza electrostática Frotamiento estatico Micromáquina Miniaturización Modelización Método elemento finito Viga cantilever
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35G Mechanical and acoustical properties; adhesion

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Pacs
0710C Micromechanical devices and systems

Discipline
Mechanical engineering. Mechanical construction. Handling Metrology Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14394949

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

Access to the document

Searching the Web