Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces
- Author
- KNAPP, James A1 ; DE BOER, Maarten P2
[1] Department 1111, Radiation Solid Interactions and Processing, Sandia National Laboratories, Albuquerque, NM 87185, United States
[2] Department 1762, Reliability Physics, Sandia National Laboratories, Albuquerque, NM 87185, United States - Source
Journal of microelectromechanical systems. 2002, Vol 11, Num 6, pp 754-764, 11 p ; ref : 33 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adhérence Dispositif microélectromécanique Force électrostatique Frottement statique Micromachine Miniaturisation Modélisation Méthode élément fini Poutre cantilever
- Keyword (en)
- Adhesion Microelectromechanical device Electrostatic force Stiction Micromachine Miniaturization Modeling Finite element method Cantilever beam
- Keyword (es)
- Adherencia Dispositivo microelectromecánico Fuerza electrostática Frotamiento estatico Micromáquina Miniaturización Modelización Método elemento finito Viga cantilever
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35G Mechanical and acoustical properties; adhesion
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14394949
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2002.805047 
https://dx.doi.org/10.1109/JMEMS.2002.805047
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