A micromachined gas sensor array for automotive emissions
- Author
- STERPHAGEN, N1 ; MITZNER, Kraig D1 ; BERKENPAS, Eric J1 ; GALIPEAU, David W1
[1] Department of Electrical Engineering, South Dakota State University, Brookings SD, 57007, United States - Conference title
- IMAPS : international symposium on microelectronics (Denver CO, 4-6 September 2002)
- Conference name
- International symposium on microelectronics (Denver CO 2002-09-04)
- Author (monograph)
- International Microelectronics and Packaging Society, United States (Organiser of meeting)
- Source
SPIE proceedings series. 2002, pp 506-511, 6 p ; ref : 18 ref
- ISBN
- 0-930815-66-1
- Scientific domain
- Electronics; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur mesure Diode effet tunnel résonnant Dispositif microélectromécanique Détecteur de gaz Etude faisabilité Fabrication microélectronique Formation motif Mesure émission Micromachine Optimisation Réseau capteur
- Keyword (en)
- Measurement sensor Resonant tunneling diodes Microelectromechanical device Gas detector Feasibility studies Microelectronic fabrication Patterning Emission measure Micromachine Optimization Sensor array
- Keyword (es)
- Captador medida Dispositivo microelectromecánico Detector de gas Fabricación microeléctrica Formacíon motivo Medida emisión Micromáquina Optimización Red sensores
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F03 Diodes
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14594019
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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