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A micromachined gas sensor array for automotive emissions

Author
STERPHAGEN, N1 ; MITZNER, Kraig D1 ; BERKENPAS, Eric J1 ; GALIPEAU, David W1
[1] Department of Electrical Engineering, South Dakota State University, Brookings SD, 57007, United States
Conference title
IMAPS : international symposium on microelectronics (Denver CO, 4-6 September 2002)
Conference name
International symposium on microelectronics (Denver CO 2002-09-04)
Author (monograph)
International Microelectronics and Packaging Society, United States (Organiser of meeting)
Source

SPIE proceedings series. 2002, pp 506-511, 6 p ; ref : 18 ref

ISBN
0-930815-66-1
Scientific domain
Electronics; Optics; Physics; Telecommunications
Publisher
SPIE, Bellingham WA
Publication country
International
Document type
Conference Paper
Language
English
Keyword (fr)
Capteur mesure Diode effet tunnel résonnant Dispositif microélectromécanique Détecteur de gaz Etude faisabilité Fabrication microélectronique Formation motif Mesure émission Micromachine Optimisation Réseau capteur
Keyword (en)
Measurement sensor Resonant tunneling diodes Microelectromechanical device Gas detector Feasibility studies Microelectronic fabrication Patterning Emission measure Micromachine Optimization Sensor array
Keyword (es)
Captador medida Dispositivo microelectromecánico Detector de gas Fabricación microeléctrica Formacíon motivo Medida emisión Micromáquina Optimización Red sensores
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F03 Diodes

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14594019

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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