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Measurements of electron transport coefficients in the 0.468% and 4.910% c-C4F8/Ar mixtures and pure c-C4F8

Author
YAMAJI, Masahiro1 ; NAKAMURA, Yoshiharu1
[1] Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Yokohama 223-8522, Japan
Source

Journal of physics. D, Applied physics (Print). 2003, Vol 36, Num 6, pp 640-644, 5 p ; ref : 23 ref

CODEN
JPAPBE
ISSN
0022-3727
Scientific domain
Condensed state physics; Physics; Plasma physics
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Argon Carbone fluorure Coefficient diffusion Coefficient transport Diagnostic plasma Dispositif expérimental Dérive électron Etude expérimentale Mélange gaz Méthode mesure Tube glissement Vitesse dérive
Keyword (en)
Argon Carbon fluorides Diffusion coefficient Transport coefficient Plasma diagnostics Experimental device Electron drift Experimental study Gas mixtures Measuring methods Drift tubes Drift velocity
Keyword (es)
Coeficiente difusión Coeficiente transporte Dispositivo experimental
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B70 Plasma diagnostic techniques and instrumentation / 001B50B70N Particle measurements

Pacs
5270N Particle measurements

Discipline
Physics of gases, plasmas and electric discharges
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14598643

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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