Metal-catalyzed addition polymers for 157 nm resist applications. Synthesis and polymerization of partially fluorinated, ester-functionalized tricyclo[4.2.1.02,5]non-7-enes
- Author
- SANDERS, Daniel P1 ; CONNOR, Eric F1 ; GRUBBS, Robert H1 ; HUNG, Raymond J2 ; OSBORN, Brian P2 ; CHIBA, Takashi2 ; MACDONALD, Scott A2 ; WILLSON, C. Grant2 ; CONLEY, Will3
[1] Arnold and Mabel Beckman Laboratories of Chemical Synthesis, Division of Chemistry and Chemical Engineering, California Institute of Technology, Pasadena, California 91125, United States
[2] Departments of Chemistry and Chemical Engineering, University of Texas, Austin, Texas 78712, United States
[3] International SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741-6499, United States - Source
Macromolecules. 2003, Vol 36, Num 5, pp 1534-1542, 9 p ; ref : 41 ref
- CODEN
- MAMOBX
- ISSN
- 0024-9297
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- American Chemical Society, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Absorption optique Composé tricyclique Etude expérimentale Norbornène dérivé polymère Palladium complexe Photorésist Polymère fluor Polymère fonctionnel Polymère saturé Polymérisation catalyseur complexe Préparation Stéréoisomère exo Propriété optique
- Keyword (en)
- Optical absorption Tricyclic compound Experimental study Norbornene derivative polymer Palladium complex Photoresist Fluorine containing polymer Functional polymer Saturated polymer Complex catalyst polymerization Preparation Exo stereoisomer Optical properties
- Keyword (es)
- Absorción óptica Compuesto tricíclico Estudio experimental Norborneno derivado polímero Paladio complejo Fotorresistencia Polímero flúor Polímero funcional Polímero saturado Polimerización catalizador complejo Preparación Estereoisómero exo Propiedad óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09D Organic polymers / 001D09D02 Preparation, kinetics, thermodynamics, mechanism and catalysts / 001D09D02E Polymers with particular properties
- Discipline
- Physical chemistry of polymers
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14660883
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1021/ma021131i 
https://dx.doi.org/10.1021/ma021131i
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