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Metal-catalyzed addition polymers for 157 nm resist applications. Synthesis and polymerization of partially fluorinated, ester-functionalized tricyclo[4.2.1.02,5]non-7-enes

Author
SANDERS, Daniel P1 ; CONNOR, Eric F1 ; GRUBBS, Robert H1 ; HUNG, Raymond J2 ; OSBORN, Brian P2 ; CHIBA, Takashi2 ; MACDONALD, Scott A2 ; WILLSON, C. Grant2 ; CONLEY, Will3
[1] Arnold and Mabel Beckman Laboratories of Chemical Synthesis, Division of Chemistry and Chemical Engineering, California Institute of Technology, Pasadena, California 91125, United States
[2] Departments of Chemistry and Chemical Engineering, University of Texas, Austin, Texas 78712, United States
[3] International SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741-6499, United States
Source

Macromolecules. 2003, Vol 36, Num 5, pp 1534-1542, 9 p ; ref : 41 ref

CODEN
MAMOBX
ISSN
0024-9297
Scientific domain
Polymers, paint and wood industries
Publisher
American Chemical Society, Washington, DC
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Absorption optique Composé tricyclique Etude expérimentale Norbornène dérivé polymère Palladium complexe Photorésist Polymère fluor Polymère fonctionnel Polymère saturé Polymérisation catalyseur complexe Préparation Stéréoisomère exo Propriété optique
Keyword (en)
Optical absorption Tricyclic compound Experimental study Norbornene derivative polymer Palladium complex Photoresist Fluorine containing polymer Functional polymer Saturated polymer Complex catalyst polymerization Preparation Exo stereoisomer Optical properties
Keyword (es)
Absorción óptica Compuesto tricíclico Estudio experimental Norborneno derivado polímero Paladio complejo Fotorresistencia Polímero flúor Polímero funcional Polímero saturado Polimerización catalizador complejo Preparación Estereoisómero exo Propiedad óptica
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09D Organic polymers / 001D09D02 Preparation, kinetics, thermodynamics, mechanism and catalysts / 001D09D02E Polymers with particular properties

Discipline
Physical chemistry of polymers
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14660883

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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