Dynamic MC simulation for a-C:H deposition in methane plasma based on subplantation model

Autor

MIYAGAWA, Y¹ ; NAKADATE, H² ; IKEYAMA, M¹ ; NAKAO, S¹ ; MIYAGAWA, S¹
[1] National Institute of Advanced Industrial Science and Technology (AIST), Shimo-Sidami, Moriyama-ku, Nagoya, Japan
[2] PEGASUS Software Inc., Hachobori, Chuo-ku, Tokyo, Japan

Titulo de la conferencia

Proceedings of Diamond 2002, the 13th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide, Granada, Spain, 3-8 September 2002

Nombre de la conferencia

European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide (13 ; Granada 2002-09-03)

Autor ( monografía)

ROBERTSON, John (Editor)¹ ; KAWARADA, Hiroshi (Editor)^{2 3 4} ; KOHN, Erhard (Editor)⁵ ; SITAR, Zlatko (Editor)⁶
[1] Department of Engineering, University of Cambridge, Cambridge, United Kingdom
[2] CREST, Japan Science and Technology Corporation (JST), Tokyo, Japan
[3] School of Science and Engineering, Waseda University, Ohkubo 3-4-1, Shinjuku-ku, Tokyo 169-8555, Japan
[4] FCT Project/JFCC, Tokyo, Japan
[5] University of Ulm, Albert-Einstein-Allee 45, 89081 Ulm, Germany
[6] Department of Materials Science and Engineering, North Carolina State University, 215 Research Building I, Box 7919, Raleigh, NC 27695, United States

Fuente

Diamond and related materials. 2003, Vol 12, Num 3-7, pp 927-930, 4 p ; ref : 16 ref

ISSN

0925-9635

Campo Científico

Crystallography

Editor

Elsevier, Amsterdam

País de la publicación

Netherlands

Tipo de documento

Conference Paper

Idioma

English

Palabra clave de autor

Amorphous hydrogenated carbon Diamond-like carbon Dynamic Monte Carlo simulation Ion-assisted deposition a-C:H

Palabra clave (fr)

Carbone Couche mince Couche ultramince Croissance film Implantation ion Matériau amorphe hydrogéné Modèle dynamique Méthode Monte Carlo Préparation Simulation ordinateur Source plasma a-C:H Non métal

Palabra clave (in)

Carbon Thin films Ultrathin films Film growth Ion implantation Amorphous hydrogenated material Dynamic model Monte Carlo methods Preparation Computerized simulation Plasma sources Nonmetals

Palabra clave (es)

Modelo dinámico Preparación

Clasificación

Pascal

001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05T Fullerenes and related materials; diamonds, graphite

Pascal

001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15A Theory and models of film growth

Pacs

8115A Theory and models of film growth

Disciplina

Physics and materials science

Procedencia

Inist-CNRS

Base de datos

PASCAL

Identificador INIST

14761823

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS