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Measurement of toxic volatile organic compounds in indoor air of semiconductor foundries using multisorbent adsorption/thermal desorption coupled with gas chromatography-mass spectrometry

Author
WU, Chien-Hou1 ; LIN, Ming-Nan1 ; FENG, Chien-Tai1 ; YANG, Kuang-Ling1 ; LO, Yu-Shiu1 ; LO, Jiunn-Guang1 2
[1] Department of Atomic Science, National Tsing Hua University, Hsinchu 300, Taiwan, Province of China
[2] Department of Radiological Technology, Yuan-Pei Institute of Science and Technology, Hsinchu 300, Taiwan, Province of China
Source

Journal of chromatography. 2003, Vol 996, Num 1-2, pp 225-231, 7 p ; ref : 10 ref

CODEN
JOCRAM
ISSN
0021-9673
Scientific domain
Biochemistry, molecular biology, biophysics; Analytical chemistry; Pharmacology drugs
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Author keyword
: Multisorbent adsorption Air analysis Environmental analysis Thermal desorption Volatile organic compounds
Keyword (fr)
Adsorption Air Analyse chimique Chromatographie phase gazeuse Composé organique volatil Fabrication microélectronique Industrie électronique Lieu travail Méthode analyse Méthode couplée Pollution air Pollution intérieur Salle blanche Semiconducteur Spectrométrie masse Température cryogénique Thermodésorption
Keyword (en)
Adsorption Air Chemical analysis Gas chromatography Volatile organic compound Microelectronic fabrication Electronics industry Work place Analysis method Coupled method Air pollution Indoor pollution Clean room Semiconductor materials Mass spectrometry Cryogenic temperature Thermodesorption
Keyword (es)
Adsorción Aire Análisis químico Cromatografía fase gaseosa Compuesto orgánico volátil Fabricación microeléctrica Industria electrónica Lugar trabajo Método análisis Método acoplado Contaminación aire Polución interior Sala blanca Semiconductor(material) Espectrometría masa Temperatura criogénica Desabsorción térmica
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03B Testing, measurement, noise and reliability

Pascal
002 Biological and medical sciences / 002B Medical sciences / 002B30 Public health. Hygiene-occupational medicine / 002B30B Occupational medicine / 002B30B02 Ergonomics. Workplace layout. Occupational psychology / 002B30B02C Sampling, pollutant analysis method, on the work place

Discipline
Electronics Public health. Hygiene-occupational medicine
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
14808380

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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