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Mechanism and energetics of dimerization of SiH2 radicals on H-terminated Si(001)-(2 x 1) surfaces

Author
SRIRAMAN, Saravanapriyan1 ; MAHALINGAM, Pushpa2 ; AYDIL, Eray S1 ; MAROUDAS, Dimitrios3
[1] Department of Chemical Engineering, Engineering II Bldg., University of California, Santa Barbara, CA 93106-5080, United States
[2] Texas Instruments, 13121 TI Blvd, MS352, Dallas, TX 75243, United States
[3] Department of Chemical Engineering, University of Massachusetts, Amherst, MA 01003-3110, United States
Source

Surface science. 2003, Vol 540, Num 2-3, pp L623-L630 ; ref : 36 ref

CODEN
SUSCAS
ISSN
0039-6028
Scientific domain
General chemistry, physical chemistry; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics; Polymers, paint and wood industries
Publisher
Elsevier Science, Amsterdam / Elsevier Science, Lausanne / Elsevier Science, New York, NY
Publication country
Netherlands
Document type
Article
Language
English
Author keyword
Hydrogen atom Molecular dynamics Plasma processing Semiconductor-semiconductor thin film structures Silicon Surface chemical reaction
Keyword (fr)
Adsorbant minéral Adsorbat minéral Adsorption gaz solide Changement conformation Dimérisation Dynamique surface Energie surface Etude théorique Face cristalline Interface gaz solide Méthode dynamique moléculaire Méthode fonctionnelle densité Orientation moléculaire Réaction surface Silicium Silylène minéral Structure adsorption
Keyword (en)
Inorganic adsorbent Inorganic adsorbate Gas solid adsorption Conformational changes Dimerization Surface dynamics Surface energy Theoretical study Crystal faces Gas solid interface Molecular dynamics method Density functional method Molecular orientation Surface reactions Silicon Inorganic silylene Adsorption structure
Keyword (es)
Adsorbente inorgánico Adsorbato inorgánico Adsorción gas sólido Interfase gas sólido Silileno inorgánico Estructura adsorción
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H45 Solid-fluid interfaces / 001B60H45D Adsorption and desorption kinetics; evaporation and condensation

Pascal
001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry / 001C01I Surface physical chemistry / 001C01I04 Solid-gas interface

Discipline
General chemistry and physical chemistry Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
15044045

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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