Influence of annealing temperature on the properties of titanium oxide thin film
- Author
- HOU, Ya-Qi1 ; ZHUANG, Da-Ming1 ; GONG ZHANG1 ; MING ZHAO1 ; WU, Min-Sheng1
[1] Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China - Source
Applied surface science. 2003, Vol 218, Num 1-4, pp 97-105, 9 p ; ref : 16 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Anatase Annealing Optical property Titanium oxide thin film: Mid-frequency ac magnetron sputtering
- Keyword (fr)
- Anatase Couche mince Diffraction RX Effet température Etat amorphe Facteur réflexion Facteur transmission Indice extinction Indice réfraction Microscopie force atomique Microstructure Recuit Rutile Structure surface Titane oxyde Composé minéral Métal transition composé O Ti TiO2
- Keyword (en)
- Anatase Thin films XRD Temperature effects Amorphous state Reflectivity Transmittance Extinction index Refractive index Atomic force microscopy Microstructure Annealing Rutile Surface structure Titanium oxides
- Keyword (es)
- Anatasa Factor transmisión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H20 Optical properties of bulk materials and thin films / 001B70H20C Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
- Pacs
- 7820C Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15114627
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0169-4332(03)00569-5 
https://dx.doi.org/10.1016/S0169-4332(03)00569-5
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