Silicon nitride nanosieve membrane
- Author
- TONG, Hien D1 ; JANSEN, Henri V1 ; GADGIL, Vishwas J1 ; BOSTAN, Cazimir G1 ; BERENSCHOT, Erwin1 ; VAN RIJN, Cees J. M1 ; ELWENSPOEK, Miko1
[1] MESA+ Research Institute, University of Twente, P.O. Box 217, 7500 AE Enschede, Netherlands - Source
Nano letters (Print). 2004, Vol 4, Num 2, pp 283-287, 5 p ; ref : 26 ref
- Publisher
- American Chemical Society, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé binaire Couche ultramince Etude expérimentale Gravure faisceau ionique Matériau poreux Membrane Microscopie électronique balayage Nanomatériau Porosité Résistance mécanique Silicium nitrure Tamis N Si Nanotamis SiN Composé minéral
- Keyword (en)
- Binary compound Ultrathin films Experimental study Ion beam etching Porous material Membrane Scanning electron microscopy Nanostructured materials Porosity Strength Silicon nitride Sieve Nanosieve Inorganic compound
- Keyword (es)
- Compuesto binario Estudio experimental Grabado haz iónico Material poroso Membrana Microscopía electrónica barrido Porosidad Resistencia mecánica Silicio nitruro Tamiz Compuesto inorgánico
- Classification
- Pascal
- 002 Biological and medical sciences / 002A Fundamental and applied biological sciences. Psychology / 002A04 Molecular and cellular biology / 002A04F Cell structures and functions / 002A04F02 Cell membranes. Ionic channels. Membrane pores
- Discipline
- Molecular and cell biology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15495483
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1021/nl0350175 
https://dx.doi.org/10.1021/nl0350175
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