Stress investigation of PECVD dielectric layers for advanced optical MEMS
- Author
- TARRAF, A1 ; DALEIDEN, J2 ; IRMER, S1 ; PRASAI, D2 ; HILLMER, H1
[1] Institute of Microstructure Technologies and Analytics (IMA) and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Str 40, 34132 Kassel, Germany
[2] Infineon Technologies AG, Munich, Germany - Source
Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 3, pp 317-323, 7 p ; ref : 20 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche sacrificielle Dispositif microélectromécanique Diélectrique Dépôt chimique phase vapeur Interféromètre Fabry Pérot Mesure contrainte Mesure optique Méthode PECVD Optique intégrée Photorésist Silicium nitrure Silicium oxyde 0710C 8540H
- Keyword (en)
- Sacrificial layer Microelectromechanical device Dielectric materials Chemical vapor deposition Fabry Pérot interferometer Stress measurement Optical measurement PECVD Integrated optics Photoresist Silicon nitride Silicon oxides
- Keyword (es)
- Capa sacrificial Dispositivo microelectromecánico Dieléctrico Depósito químico fase vapor Interferómetro Fabry Pérot Medida óptica Optica integrada Fotorresistencia Silicio nitruro
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15561638
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/14/3/001 
https://dx.doi.org/10.1088/0960-1317/14/3/001
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