An integrated microelectromechanical resonant output gyroscope
- Author
- SESHIA, Ashwin A1 ; HOWE, Roger T1 ; MONTAGUE, Stephen2
[1] 497 Cory Hall, Dept. of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, United States
[2] Sandia National Laboratories, Albuquerque, NM 87185, United States - Conference title
- MEMS 2002 : micro electro mechanical systems (Las Vegas NV, 20-24 January 2002)
- Conference name
- IEEE international conference on micro electro mechanical systems (15 ; Las Vegas NV 2002-01-20)
- Author (monograph)
- IEEE, United States (Organiser of meeting)
Robotics and Automation Society, United States (Organiser of meeting) - Source
Proceedings, IEEE micro electro mechanical systems. 2002, pp 722-726, 5 p ; ref : 8 ref
- ISSN
- 1084-6999
- ISBN
- 0-7803-7185-2
- Scientific domain
- Electronics; Metrology and instrumentation
- Publisher
- IEEE, Piscataway NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur mesure Dispositif microélectromécanique 0707D
- Keyword (en)
- Measurement sensor Microelectromechanical device
- Keyword (es)
- Captador medida Dispositivo microelectromecánico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15714519
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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