Conformal grating electromechanical system (GEMS) for high-speed digital light modulation
- Author
- KOWARZ, Marek W1 ; BRAZAS, John C1 ; PHALEN, James G1
[1] Integrated Materials and Microstructures Laboratory, Eastman Kodak Company, 1999 Lake Ave., Rochester, NY 14650-2015, United States - Conference title
- MEMS 2002 : micro electro mechanical systems (Las Vegas NV, 20-24 January 2002)
- Conference name
- IEEE international conference on micro electro mechanical systems (15 ; Las Vegas NV 2002-01-20)
- Author (monograph)
- IEEE, United States (Organiser of meeting)
Robotics and Automation Society, United States (Organiser of meeting) - Source
Proceedings, IEEE micro electro mechanical systems. 2002, pp 568-573, 6 p ; ref : 8 ref
- ISSN
- 1084-6999
- ISBN
- 0-7803-7185-2
- Scientific domain
- Electronics; Metrology and instrumentation
- Publisher
- IEEE, Piscataway NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Dispositif microélectromécanique Dispositif optique 4279
- Keyword (en)
- Microelectromechanical device Optical devices
- Keyword (es)
- Dispositivo microelectromecánico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15714641
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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