Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories
- Author
- PFLUG, Andreas1 ; SITTINGER, Volker1 ; RUSKE, Florian1 ; SZYSZKA, Bernd1 ; DITTMAR, Georg2
[1] Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder We.g. 54e, 38108 Braunschweig, Germany
[2] Sentech Instruments GmbH, Carl-Scheele-Str. 16, 12489 Berlin, Germany - Conference title
- The 3rd International Conference on Spectroscopic Ellipsometry, Vienna, Austria, 6-11 July, 2003
- Conference name
- ICSE-3: International Conference on Spectroscopic Ellipsometry (3 ; Vienna 2003-07-06)
- Author (monograph)
- FRIED, MiklÓs (Editor); HINGERL, Kurt (Editor); HUMLICEK, Josef (Editor)
- Source
Thin solid films. 2004, Vol 455-56, pp 201-206, 6 p ; ref : 15 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Advanced dispersion theories Aluminum-doped zinc oxide films Optical characterization
- Keyword (fr)
- Addition aluminium Composé binaire Couche mince Croissance cristalline en phase vapeur Dispersion Dopage Dépôt pulvérisation Ellipsométrie spectroscopique Etude expérimentale Facteur réflexion Facteur transmission Matériau transparent Porteur libre Résistivité couche Semiconducteur II-VI Spectre IR Spectre transformée Fourier Zinc oxyde O Zn Substrat verre Théorie dispersion Zno Composé minéral Métal transition composé
- Keyword (en)
- Aluminium additions Binary compounds Thin films Crystal growth from vapors Dispersions Doping Sputter deposition Spectroscopic ellipsometry Experimental study Reflectivity Transmittance Transparent material Free carrier Sheet resistivity II-VI semiconductors Infrared spectra Fourier transform spectra Zinc oxides Dispersion theory Inorganic compounds Transition element compounds
- Keyword (es)
- Doping Elipsometría espectroscópica Factor transmisión Material transparente Portador libre
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H40 Visible and ultraviolet spectra / 001B70H40F Semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Pacs
- 7840F Semiconductors
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15773368
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2004.01.006 
https://dx.doi.org/10.1016/j.tsf.2004.01.006
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