Fabrication of diffractive optical elements by ArF-laser ablation of fused silica
- Author
- BEKESI, Jozsef1 ; SCHÄFER, Dirk1 ; IHLEMANN, Jürgen1 ; SIMON, Peter1
[1] Laser-Laboratorium Göttingen, Hans-Adolf-Krebs-Weg 1, 37077 Gottingen, Germany - Conference title
- Photon processing in microelectronics and photonics II (San Jose CA, 27-30 January 2003)
- Conference name
- Photon processing in microelectronics and photonics. Conference (2 ; San Jose CA 2003-01-27)
- Author (monograph)
- Piqué, Alberto (Editor); Sugioka, Koji (Editor); Murakami, Kouichi (Editor); Herman, Peter R (Editor); Fieret, Jim (Editor); Bachmann, Friedrich G (Editor); Dubowski, Jan J (Editor); Hoving, Willem (Editor); Washio, Kunihiko (Editor); Geohegan, David B (Editor); Trager, Frank (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 2003, pp 235-240, 6 p ; ref : 20 ref
- ISBN
- 0-8194-4777-3
- Scientific domain
- Electronics; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Application laser Domaine temps fs Elément optique diffractif Impulsion laser Laser UV Méthode ablation laser Silice fusionnée
- Keyword (en)
- Laser beam applications fs range Diffractive optical elements Laser pulse Ultraviolet laser Laser ablation technique
- Keyword (es)
- Impulsión láser Laser UV
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B62 Biological and medical applications / 001B40B62C Industrial applications
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79D Gratings
- Discipline
- Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15953575
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Install on your browser
"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:9:\"\u0000*\u0000jtitle\";s:23:\"SPIE proceedings series\";s:9:\"\u0000*\u0000stitle\";s:14:\"SPIE proc. ser\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"235\";s:8:\"\u0000*\u0000epage\";s:3:\"240\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:0:\"\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"BEKESI\";s:10:\"\u0000*\u0000aufirst\";s:6:\"Jozsef\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:3:{i:0;s:14:\"SCH\u00c4FER, Dirk\";i:1;s:17:\"IHLEMANN, J\u00fcrgen\";i:2;s:12:\"SIMON, Peter\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"0-8194-4777-3\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:88:\"Photon processing in microelectronics and photonics II (San Jose CA, 27-30 January 2003)\";s:8:\"\u0000*\u0000title\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:8:\"\u0000*\u0000place\";s:13:\"Bellingham WA\";s:6:\"\u0000*\u0000pub\";s:4:\"SPIE\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Panist access
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:9:\"\u0000*\u0000jtitle\";s:23:\"SPIE proceedings series\";s:9:\"\u0000*\u0000stitle\";s:14:\"SPIE proc. ser\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"235\";s:8:\"\u0000*\u0000epage\";s:3:\"240\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:0:\"\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"BEKESI\";s:10:\"\u0000*\u0000aufirst\";s:6:\"Jozsef\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:3:{i:0;s:14:\"SCH\u00c4FER, Dirk\";i:1;s:17:\"IHLEMANN, J\u00fcrgen\";i:2;s:12:\"SIMON, Peter\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"0-8194-4777-3\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:88:\"Photon processing in microelectronics and photonics II (San Jose CA, 27-30 January 2003)\";s:8:\"\u0000*\u0000title\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:8:\"\u0000*\u0000place\";s:13:\"Bellingham WA\";s:6:\"\u0000*\u0000pub\";s:4:\"SPIE\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Istex access
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:9:\"\u0000*\u0000jtitle\";s:23:\"SPIE proceedings series\";s:9:\"\u0000*\u0000stitle\";s:14:\"SPIE proc. ser\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"235\";s:8:\"\u0000*\u0000epage\";s:3:\"240\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:0:\"\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"BEKESI\";s:10:\"\u0000*\u0000aufirst\";s:6:\"Jozsef\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:3:{i:0;s:14:\"SCH\u00c4FER, Dirk\";i:1;s:17:\"IHLEMANN, J\u00fcrgen\";i:2;s:12:\"SIMON, Peter\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"0-8194-4777-3\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:88:\"Photon processing in microelectronics and photonics II (San Jose CA, 27-30 January 2003)\";s:8:\"\u0000*\u0000title\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:8:\"\u0000*\u0000place\";s:13:\"Bellingham WA\";s:6:\"\u0000*\u0000pub\";s:4:\"SPIE\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
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"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:9:\"\u0000*\u0000jtitle\";s:23:\"SPIE proceedings series\";s:9:\"\u0000*\u0000stitle\";s:14:\"SPIE proc. ser\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"235\";s:8:\"\u0000*\u0000epage\";s:3:\"240\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:0:\"\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"BEKESI\";s:10:\"\u0000*\u0000aufirst\";s:6:\"Jozsef\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:3:{i:0;s:14:\"SCH\u00c4FER, Dirk\";i:1;s:17:\"IHLEMANN, J\u00fcrgen\";i:2;s:12:\"SIMON, Peter\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"0-8194-4777-3\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:88:\"Photon processing in microelectronics and photonics II (San Jose CA, 27-30 January 2003)\";s:8:\"\u0000*\u0000title\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:8:\"\u0000*\u0000place\";s:13:\"Bellingham WA\";s:6:\"\u0000*\u0000pub\";s:4:\"SPIE\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
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"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:9:\"\u0000*\u0000jtitle\";s:23:\"SPIE proceedings series\";s:9:\"\u0000*\u0000stitle\";s:14:\"SPIE proc. ser\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"235\";s:8:\"\u0000*\u0000epage\";s:3:\"240\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:0:\"\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"BEKESI\";s:10:\"\u0000*\u0000aufirst\";s:6:\"Jozsef\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:3:{i:0;s:14:\"SCH\u00c4FER, Dirk\";i:1;s:17:\"IHLEMANN, J\u00fcrgen\";i:2;s:12:\"SIMON, Peter\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"0-8194-4777-3\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:88:\"Photon processing in microelectronics and photonics II (San Jose CA, 27-30 January 2003)\";s:8:\"\u0000*\u0000title\";s:81:\"Fabrication of diffractive optical elements by ArF-laser ablation of fused silica\";s:8:\"\u0000*\u0000place\";s:13:\"Bellingham WA\";s:6:\"\u0000*\u0000pub\";s:4:\"SPIE\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
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