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InN grown by remote plasma-enhanced chemical vapor deposition

Author
WINTREBERT-FOUQUET, M1 ; BUTCHER, K. Scott A1 ; CHEN, P. P.-T1
[1] Physics Department, Macquarie University, Sydney NSW 2109, Australia
Conference title
ONR Indium Nitride Workshop: Proceedings of the First International Indium Nitride Workshop, 16-20 November 2003, Fremantle, Australia
Conference name
International Workshop on Indium Nitride (1 ; Fremantle 2003-11-16)
Author (monograph)
BUTCHER, K. S. A (Editor)1
US Office of Naval Research (ONR), United States (Funder/Sponsor)
[1] Physics Department, Macquarie University, Sydney, NSW 2109, Australia
Source

Journal of crystal growth. 2004, Vol 269, Num 1, pp 134-138, 5 p ; ref : 13 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Author keyword
52.75.R 73.61.E 78.66.F Al. Characterization: A3. Chemical vapor deposition processes 81.15.G Bl. Nitrides
Keyword (fr)
Composé binaire Couche mince Couche épaisse Croissance cristalline en phase vapeur Densité optique Diffraction RX Dépendance température Dépôt chimique phase vapeur Effet Hall Effet dimensionnel Epaisseur Etude expérimentale Indium nitrure Méthode PECVD Semiconducteur III-V Spectre SIMS Spectre absorption In N InN Substrat Al2O3 Substrat Si Composé minéral
Keyword (en)
Binary compounds Thin films Thick films Crystal growth from vapors Optical density XRD Temperature dependence CVD Hall effect Size effect Thickness Experimental study Indium nitrides PECVD III-V semiconductors Secondary ion mass spectra Absorption spectra Inorganic compounds
Keyword (es)
Densidad óptica
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H40 Visible and ultraviolet spectra / 001B70H40F Semiconductors

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)

Pacs
7840F Semiconductors

Pacs
8115G Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16042425

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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