Properties and thermal stability of porous organic low-dielectric-constant materials
- Author
- CHANG, Shou-Yi1 ; JANG, Syun-Ming2 ; LIN, Su-Jien3 ; LIANG, Mong-Song2
[1] Department of Materials Engineering, National Chung Hsing University, Taichung 402, Taiwan, Province of China
[2] Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, Science Based Industrial Park, Hsinchu 300, Taiwan, Province of China
[3] Department of Materials Science and Engineering, National Tsing Hua University 101, Section 2 Kuang Eu Road, Hsinchu 300, Taiwan, Province of China - Source
Thin solid films. 2004, Vol 466, Num 1-2, pp 54-61, 8 p ; ref : 25 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- Dielectric properties Dielectrics Stress Thermal stability
- Keyword (fr)
- Constante diélectrique Contrainte compression Contrainte résiduelle Couche mince Croissance cristalline en solution Décomposition thermique Dégradation Dépôt centrifugation Etude expérimentale Matériau diélectrique Matériau poreux Procédé sol gel Relaxation contrainte Stabilité thermique Traitement thermique Composé organique
- Keyword (en)
- Permittivity Compressive stress Residual stresses Thin films Crystal growth from solutions Thermal decomposition Degradation Spin-on coating Experimental study Dielectric materials Porous materials Sol-gel process Stress relaxation Thermal stability Heat treatments Organic compounds
- Keyword (es)
- Tensión compresión Descomposición térmica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20F Deformation and plasticity (including yield, ductility, and superplasticity)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70G Dielectrics, piezoelectrics, and ferroelectrics and their properties / 001B70G22 Dielectric properties of solids and liquids / 001B70G22C Permittivity (dielectric function)
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16111541
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2004.01.112 
https://dx.doi.org/10.1016/j.tsf.2004.01.112
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