Structural properties of d.c. magnetron sputtered B-C-N thin films and correlation to their mechanical properties: a new empirical formula
- Author
- LINSS, V1 ; BARZOLA-QUIQUIA, J1 ; HÄUSSLER, P1 ; RICHTER, F1
[1] TU Chemnitz, Institut für Physik, Physik fester Koerper, Chemnitz 09107, Germany - Source
Thin solid films. 2004, Vol 467, Num 1-2, pp 66-75, 10 p ; ref : 16 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- Amorphous structure BCN Electron diffraction Empirical formula Mechanical properties
- Keyword (fr)
- Bore nitrure Carbone nitrure Composition chimique Composé ternaire Couche mince Diffraction électron Dureté Etude expérimentale Facteur structure Magnétron Matériau amorphe Module Young Méthode ERDA Méthode phase vapeur Nanoindentation Préparation Pulvérisation cathodique Spectrométrie perte énergie électron B C N BCN Substrat NaCl
- Keyword (en)
- Boron nitrides Carbon nitrides Chemical composition Ternary compounds Thin films Electron diffraction Hardness Experimental study Structure factors Magnetrons Amorphous material Young modulus Elastic recoil detection analysis method Growth from vapor Nanoindentation Preparation Cathode sputtering EEL spectroscopy
- Keyword (es)
- Material amorfo Método ERDA Método fase vapor Nanoindentacion Preparación
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20Q Tribology and hardness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16121721
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2004.03.008 
https://dx.doi.org/10.1016/j.tsf.2004.03.008
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