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Tantalum films for protective coatings of steel

Author
GLADCZUK, Leszek1 ; PATEL, Anamika1 ; CHARANJEET SINGH PAUR1 ; SOSNOWSKI, Marek1
[1] Department of Electrical and Computer Engineering, New Jersey Institute of Technology, University Heights, Newark, NJ 07102, United States
Source

Thin solid films. 2004, Vol 467, Num 1-2, pp 150-157, 8 p ; ref : 23 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Article
Language
English
Author keyword
68.55.Ng 81.15.Cd 81.71J.Bt Physical vapor deposition Phase transitions Tantalum
Keyword (fr)
Adhérence Composition phase Corrosion Couche mince Couche épaisse Croissance cristalline en phase vapeur Ductilité Délaminage Essai rayage Etude expérimentale Fissure Magnétron Matériau réfractaire Nucléation Pulvérisation cathodique Revêtement protecteur Réseau cubique centré Réseau quadratique Tantale Tenacité Substrat Si Substrat SiO2 Substrat acier Ta Composé minéral Métal transition
Keyword (en)
Adhesion Phase composition Corrosion Thin films Thick films Crystal growth from vapors Ductility Delamination Scratching test Experimental study Cracks Magnetrons Heat resistant materials Nucleation Cathode sputtering Protective coatings BCC lattices Tetragonal lattices Tantalum Fracture toughness Inorganic compounds Transition elements
Keyword (es)
Composición fase Ensayo al rayado
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20F Deformation and plasticity (including yield, ductility, and superplasticity)

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60D Equations of state, phase equilibria, and phase transitions / 001B60D60 General studies of phase transitions / 001B60D60Q Nucleation

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Pacs
6220F Deformation and plasticity (including yield, ductility, and superplasticity)

Pacs
6460Q Nucleation

Pacs
8115C Deposition by sputtering

Discipline
Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16121733

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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