On the use of neural networks to solve the reverse modelling problem for the quantification of dopant profiles extracted by scanning probe microscopy techniques
- Author
- CIAPPA, Mauro1 ; STANGONI, Maria1 ; FICHTNER, Wolfgang1 ; RICCI, Elisa2 ; SCORZONI, Andrea2
[1] Swiss Federal Institute of Technology (ETH) Zurich, Integrated Systems Laboratory, Zurich, Switzerland
[2] University of Perugia, Faculty of Engineering, Perugia, Italy - Conference title
- Reliability of electron devices, failure physics and analysis
- Conference name
- ESRF 2004 European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (15 ; Zurich 2004-10-04)
- Author (monograph)
- STOJADINOVIC, N. D (Editor)1 ; PECHT, M. G (Editor)2 ; CIAPPA, Mauro (Editor)3 ; FICHTNER, Wolfgang (Editor)3
[1] Department of Microelectronics, Faculty of Electronic Engineering, University of Niš, Beogradska 14, 18000 Niš, Yugoslavia
[2] CALCE Electronic Products Systems Centre, Room 1103, Engineering Classroom Building, University of Maryland, College Park, MD 20742, United States
[3] Physical Characterization Group, Integrated Systems Laboratory, Swiss Federal Institute of Tech., ETH-Zentrum, 8092 Zurich, Switzerland - Source
Microelectronics and reliability. 2004, Vol 44, Num 9-11, pp 1703-1708, 6 p ; ref : 8 ref
- CODEN
- MCRLAS
- ISSN
- 0026-2714
- Scientific domain
- Electronics
- Publisher
- Elsevier, Oxford
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Densité porteur charge Distribution concentration Evaluation performance Microscopie champ proche Modélisation Profil dopage Réseau neuronal Immunité bruit
- Keyword (en)
- Charge carrier density Concentration distribution Performance evaluation Scanning probe microscopy Modeling Doping profile Neural network Noise immunity
- Keyword (es)
- Concentración portador carga Distribución concentración Evaluación prestación Microscopía campo próximo Modelización Perfil doping Red neuronal Inmunidad ruido
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G03 Neural networks
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16182757
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.microrel.2004.07.058 
https://dx.doi.org/10.1016/j.microrel.2004.07.058
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